F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded together with test methods suitable

together with test methods suitable for determining their magnitudes

This Specification describes the volume within any process or cassette module which shall be accessible to the transport module end effector in a cluster tool

SEMI PV66-0715 (Reapproved 0221)

本文書における計量の標準単位としては，国際単位系（SI）が使用される。米国常用単量は参考目的のみのために括弧内に併記され，最も近い数値に丸められている。

24 Ω·cm to about 330 Ω·cm in p-type wafers)

F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded together with test methods suitableNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,