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SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
poly-Si or low temperature oxide (LTO)
SEMI S1-0701E (editorial revision)
· 緊急操作
This Document describes the procedures for testing the leak integrity
P04500 - SEMI P45 - Specification for Job Deck Data Format for Mask Tools Revision:SEMI P45-0421 - Current SEMI E121 — Guide forThis Document defines the common job deck data format specifications for mask tools, namely MALY. MALY specification applies to the input data format for mask tools. Referenced SEMI Standards (purchase separately) SEMI P39 Specification for OASIS Open Artwork System Interchange Standard SEMI P44 Specification for Open Artwork System Interchange Standard (OASIS) Specific to Mask Tools Revision History SEMI P45 0421 (technical revision) SEMI P45 1218
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