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• Load port arbitration to CLJs for Internal Buffer Equipment
is increasing
SEMI M17-0704 (technical revision)
This Guide references SEMI E78
SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles
E05412 - SEMI E54.12 - Specification for Sensor/Actuator Network Communications for CC-Link Revision:SEMI E54.12-0425 - Current + Redline • Load port arbitration toNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of the SEMI sensor actuator network (SAN) suite of Standards and defines a specific communications protocol based on the CC Link standard. This network communication standard (NCS) taken together with the SEMI SAN Standard suite and the CC Link standard completely and unambiguously defines an open standard
